Company Profile and Milestones

Company Profile

Company Name	ULVAC-PHI, Inc.
Established	November 1, 1982
Capital	100 million yen
Shareholder	ULVAC, Inc.
Board of Directors and Auditor	President	Yasuhiro Hara
	Executive Director	Atsushi Ogata
	Executive Director	Haruhiko Ono
	Executive Director	Hirohisa Takahashi
	Executive Director	Daisuke Sakai
	Executive Director	Takashi Uchida
	Executive Director	Ju Hoon Shin (Executive Officer of ULVAC, Inc.)
	Executive Director	Junya Kiyota (Executive Officer of ULVAC, Inc.)
	Auditor	Kazuya Saitou (Auditor of ULVAC, Inc.)

Milestones

May 1969	Physical Electronics Inc. (PHI) forms as one of the first specialty companies for surface analysis instruments in the world, developed by Dr. R. E. Weber of the University of Minnesota.
April 1971	Japan Vacuum Engineering Co., Ltd. (now known as ULVAC, Inc.) concludes general agent agreements in Japan with PHI.
November 1982	PHI and Japan Vacuum Engineering Co., Ltd. dissolve general agent agreements to establish the joint-venture company ULVAC-PHI, Inc.
1983	Opens Osaka branch office.
September 1997	Chigasaki headquarter and factory move to the newly-built office.
February 2003	ULVAC-PHI, Inc. purchases the R&D surface analysis instrument division and becomes the leading company in the manufacture and sales of surface analysis instruments.
February 2003	Establishes Physical Electronics USA (PHI-USA).
November 2004	ULVAC-PHI, Inc. starts sales of X-ray Photoelectron Spectroscopy with a C₆₀ ion gun.
December 2008	Releases the newly-developed Gas Cluster Ion Gun.
June 2010	Releases the "PHI 4700 Thin Film Analyzer" Scanning Auger Electron Spectroscopy.
September 2010	Releases the "PHI Quantera II" Scanning XPS Microprobe.
September 2011	Releases the "PHI X-tool" Automated XPS Microprobe.
November 2012	Releases the "PHI 710" Scanning Auger Nanoprobe.
February 2015	Releases the "PHI nanoTOF II" Time-of-flight SIMS.
May 2016	Releases the "PHI 5000 VersaProbe III" Scanning XPS Microprobe.
October 2016	Releases the "Parallel imaging MS/MS option" for the PHI nanoTOF II.
February 2017	Releases the "PHI Quantes" Dual Scanning X-ray (Al Kα & Cr Kα) Photoelectron Microprobe.
August 2017	Headquarter and factory relocate to the ULVAC headquarter.
October 2021	Releases the "PHI VersaProbe 4" Scanning XPS Microprobe.
October 2021	Releases the "PHI nanoTOF 3" Time-of-flight SIMS.
July 2022	Releases the "PHI GENESIS" Scanning XPS/HAXPES Microprobe.
August 2023	Osaka branch office closed.
October 2023	Releases the "PHI nanoTOF 3⁺" Time-of-flight SIMS.
November 2023	ULVAC PHI Instruments Co., Ltd. established in China.