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ULVAC-PHI, Inc. TOP
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2022

2022

2022/07/15

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New XPS instrument PHI GENESIS released!

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2500 Hagisono, Chigasaki, Kanagawa,
253-8522, Japan

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X-ray Photoelectron Spectroscopy / XPS
Auger Electron Spectroscopy / AES, SAM
Time-of-Flight SIMS / TOF-SIMS
Dynamic-SIMS / D-SIMS
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