Features

Edited by John C. Vickerman and David Briggs

This book is an English version of an instruction manual for TOF-SIMS (Time-of-flight Secondary Ion Mass Spectrometry).

Conventional textbooks for surface analysis include some descriptions of Static SIMS and TOF-SIMS. However there is currently no comprehensive manual for TOF-SIMS which has recently become essential for SIMS.

This is the first book that gives extensive fundamental knowledge of TOF-SIMS and its multi-faceted applications.

The second edition additionally describes usage of cluster ions over a wide range.

• TOF-SIMS instruments
• The Fundamentals of Secondary Ion Formation (experiment and theory)
• Experimental Methods for Optimizing the TOF-SIMS Experiment
• Spectral Data Interpretation
• Analytical Applications

The "analytical applications" are given specific and detailed coverage in this book.